Knowledge Popularization | What is nitrogen trifluoride hazardous chemicals?

Release time:

2024-03-27 14:13

Nitrogen trifluoride, chemical formula NF, at room temperature is a colorless, odorless, stable nature of the gas, is a strong oxidant. Nitrogen trifluoride is used as an excellent plasma etching gas in the microelectronics industry. It is cleaved into active fluorine ions during ion etching. These fluorine ions have excellent etching rate and selectivity to silicon and tungsten compounds and high purity nitrogen trifluoride (to silicon oxide and silicon). It does not leave any residue on the etching surface during etching. It is a very good cleaning agent and has been widely used in chip manufacturing and high-energy lasers.

Nitrogen trifluoride (CAS:7783-54-2):

Hazards of nitrogen trifluoride: Hazard assessment in the China Hazardous Chemicals Directory-Hazardous Chemicals Classification Information Table:

① H270: May cause or aggravate combustion; oxidant.

H373: May cause damage to organs by prolonged or repeated exposure.

Nitrogen trifluoride leakage disposal: keep away from combustibles (such as wood, paper, oil, etc.). Do not touch or cross the spill. In the case of ensuring safety plugging. If possible, turn the leaking container over so that it leaks gas instead of liquid. Do not use water to directly impact the leakage or leakage source. Spray-like water suppresses the steam or changes the flow direction of the steam cloud to prevent the water flow from contacting the leak. Prevent leakage from entering water bodies, sewers, basements or confined spaces. Allow the leakage to evaporate. Isolate the leak area until the gas is exhausted. Note: Many materials become brittle when exposed to frozen/cryogenic liquids and are likely to rupture without warning.

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